AlGaN based deep ultraviolet light-emitting diodes (DUV LEDs) have wide applications in many fields, such as air and water purification, disinfection, and biochemical inspection. However, the wall ...

This work reports the design and fabrication of silicon nitride-based microresonators by employing DUV optical lithography and ICP-RIE plasma etching. Microring devices with high Q factors provide ...