China’s SMIC has reportedly produced 5nm chips without EUV using DUV and SAQP, signaling a bold shift in chipmaking amid ...

"BREAKING: China made 5nm chips without EUV ... to advanced deep ultraviolet (DUV) techniques and innovations like Self-Aligned Quadruple Patterning (SAQP), calling the result "Moore's Law ...

Shenzhen-based SiCarrier unveiled new 5nm-capable fabrication tools at SEMICON China 2025. The company claims its proprietary deep ultraviolet (DUV) and non-optical process equipment ...

DUV works, but to hit 5nm, it requires a ton of additional patterning steps. That makes everything slower, more expensive, and much harder to produce. Clearly, neither we nor China should expect ...

It has been reported that this corporation has registered a patent for DUV equipment processes that can replace EUV lithography equipment in the 5 NANO process.. Additionally, Huawei is reportedly ...

They add that the equipment is based on a laser discharge induced plasma (LDP) to produce light of 13.5nm wavelength. These reports are not ... new technology that can emit 193nm deep ultraviolet (DUV ...